Experimental investigation of anisotropic etching of silicon in tetra-methyl ammonium hydroxide
Anisotropic etching of silicon is of such fundamental importance in silicon micromachining that it has been studied and continues to be studied by many researchers. Yet, even with all the attention that it has received, there remain many difficulties, such as toxicity of the most commonly-used etcha...
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1995
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| Online Access: | http://spectrum.library.concordia.ca/141/1/MQ90888.pdf Naseh, Sasan <http://spectrum.library.concordia.ca/view/creators/Naseh=3ASasan=3A=3A.html> (1995) Experimental investigation of anisotropic etching of silicon in tetra-methyl ammonium hydroxide. Masters thesis, Concordia University. |