Development of Advanced Thin Films by PECVD for Photovoltaic Applications
Compared to wafer based solar cells, thin film solar cells greatly reduce material cost and thermal budget due to low temperature process. Monolithically manufacturing allows large area fabrication and continuous processing. In this work, several photovoltaic thin films have been developed by rf-PEC...
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| Language: | en |
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2013
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| Online Access: | http://hdl.handle.net/10012/7250 |