Novel MEMS Tunable Capacitors with Linear Capacitance-Voltage Response Considering Fabrication Uncertainties

Novel MEMS Tunable Capacitors with Linear Capacitance-Voltage Response Considering Fabrication Uncertainties

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Electrostatically actuated parallel-plate MEMS tunable capacitors are desired elements for different applications including sensing, actuating and communications and RF (radio frequency) engineering for their superior characteristics such as quick response, high Q-factor and small size. However, due...

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Bibliographic Details
Main Author: Shavezipur, Mohammad
Language:en
Published: 2008
Subjects:
MEMS capacitor
Linear capacitors
Nonlinear structural stiffness
Fabrication uncertainties
Yield optimization
Flexible-electrode capacitor
Mechanical Engineering
Online Access:http://hdl.handle.net/10012/3614

Internet

http://hdl.handle.net/10012/3614

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