Micro-electro-thermo-magnetic Actuators for MEMS Applications
This research focuses on developing new techniques and designs for highly con- trollable microactuating systems with large force-stroke outputs. A fixed-fixed mi- crobeam is the actuating element in the introduced techniques. Either buckling of a microbridge by thermal stress, lateral deflection of...
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| Language: | en |
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2008
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| Online Access: | http://hdl.handle.net/10012/3605 |