Development of Automated Robotic Microassembly for Three-dimensional Microsystems

Robotic microassembly is a process to leverage intelligent micro-robotic technologies to manipulate and assemble three-dimensional complex micro-electromechanical systems (MEMS) from a set of simple-functional microparts or subsystems. As the development of micro and nano-technologies has progressed...

Full description

Bibliographic Details
Main Author: Wang, Lidai
Other Authors: Celghorn, William L.
Language:en_ca
Published: 2009
Subjects:
Online Access:http://hdl.handle.net/1807/19254