Development of Automated Robotic Microassembly for Three-dimensional Microsystems
Robotic microassembly is a process to leverage intelligent micro-robotic technologies to manipulate and assemble three-dimensional complex micro-electromechanical systems (MEMS) from a set of simple-functional microparts or subsystems. As the development of micro and nano-technologies has progressed...
Main Author: | |
---|---|
Other Authors: | |
Language: | en_ca |
Published: |
2009
|
Subjects: | |
Online Access: | http://hdl.handle.net/1807/19254 |