Coplanar waveguide structures on micromachined glass substrates
Micromachining is currently being studied to help reduce the packaging and integration costs of multi-chip modules (MCMs) in radio frequency (RF) systems. Such systems require the integration of radiating elements, feed networks, micro-electromechanical systems (MEMS), and monolithic microwave integ...
| Main Author: | |
|---|---|
| Format: | Others |
| Language: | en en_US |
| Published: |
2007
|
| Online Access: | http://hdl.handle.net/1993/2683 |