A radiation model of a Rapid Thermal Processing system
In this thesis we study the radiative heat transfer that takes place in the axially symmetric Vortek rapid thermal processing chamber. A radiation model is derived using the theory of Shape Factors which we use to predict how chamber geometry and materials affect temperature uniformity on the pro...
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| Language: | English |
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2009
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| Online Access: | http://hdl.handle.net/2429/12741 |