A PolyMUMPs Capacitive Micromachined Ultrasonic Transducer
This work presents the design of Capacitive Micromachined Ultrasonic Transducers (CMUTs) with one and multiple bottom electrodes and their fabrication using the PolyMUMPs technique provided by MEMSCAP Inc. It also reports a new behavioral model of the CMUTs written in VHDL-AMS, complemented by a com...
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| Language: | English |
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University of British Columbia
2011
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| Online Access: | http://hdl.handle.net/2429/34000 |