The Influence of Sputtering Pressure and Film Thickness on Metal Resistivity
Electrical resistivity is an important indicator of metal thin film quality. In this study, the influence of argon working pressure on the properties of metal thin films was evaluated, and the thickness effect on the resistivity of metal thin films was investigated. The sputtered thin film resistivi...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en |
| Published: |
2010
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10048/1080 |