Surface morphology, cohesive and adhesive properties of physical vapor deposited chromium and chromium composite thin films

Surface morphology, cohesive and adhesive properties of physical vapor deposited chromium and chromium composite thin films

Chromium thin film on glass substrate is the backbone of lithographic mask production as well as in the manufacturing of precision scale gratings and reticles. The lithographic masks, precision scale gratings and reticles, which are widely used in metrology instruments, motion systems and high preci...

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Bibliographic Details
Main Author: Lazauskas, Algirdas
Other Authors: Graigaliūnas, Viktoras
Format: Doctoral Thesis
Language:English
Published: Lithuanian Academic Libraries Network (LABT) 2014
Subjects:
Materials Engineering
Thin films
Chromium
Composites
Diamond-like carbon
Plonos plėvelės
Chromas
Kompozitai
Deimanto tipo anglis
Online Access:http://vddb.library.lt/fedora/get/LT-eLABa-0001:E.02~2014~D_20141105_162006-35788/DS.005.1.01.ETD

Internet

http://vddb.library.lt/fedora/get/LT-eLABa-0001:E.02~2014~D_20141105_162006-35788/DS.005.1.01.ETD

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