Towards a Unified Framework for Design of MEMS based VLSI Systems

Current day VLSI systems have started seeing increasing percentages of multiple energy domain components being integrated into the mainstream. Energy domains such as mechanical, optical, fluidic etc. have become all pervasive into VLSI systems and such systems are being manufactured routinely. The f...

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Bibliographic Details
Main Author: Sukumar, Jairam
Other Authors: Bhat, Navakanta
Language:en_US
Published: 2018
Subjects:
Online Access:http://hdl.handle.net/2005/3100
http://etd.ncsi.iisc.ernet.in/abstracts/3958/G27565-Abs.pdf