Frequency-Tuning and Dynamic Simulation of Electrostatically Actuated Beams

Frequency-Tuning and Dynamic Simulation of Electrostatically Actuated Beams

The resonance frequency of electrostatically actuated micromachined beams can be tuned substantially by applying a DC voltage bias, first by decreasing the frequency until the onset of pull-in and then by increasing it by the virtue of contact. With the objective of modeling and designing the microm...

Full description

Bibliographic Details
Main Author: Mittal, Saurabh
Other Authors: Ananthasuresh, G K
Language:en_US
Published: 2018
Subjects:
Electrostatically Acutated Beams
Microelectro Mechanical Systems (MEMS)
Micromachined Speakers
Electostatic MEMS
Beam-based Microspeaker
Beam Structures
Folded Beams
Electrostatically Actuated Microspeakers
Beam-based Speaker
Beam-based Micro-speaker
Mechanical Engineering
Online Access:http://etd.iisc.ernet.in/handle/2005/2952
http://etd.ncsi.iisc.ernet.in/abstracts/3814/G26675-Abs.pdf

Internet

http://etd.iisc.ernet.in/handle/2005/2952
http://etd.ncsi.iisc.ernet.in/abstracts/3814/G26675-Abs.pdf

Similar Items