Design And Analysis Of MEMS Angular Rate Sensors
Design and analysis of polysilicon and single crystal silicon gyroscopes have been carried out. Variations in suspension design have been explored. Designs that utilize in-plane and out-of-plane sensing are studied. Damping plays an important role in determining the sense response. Reduction in damp...
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| Language: | en_US |
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Indian Institute of Science
2007
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| Online Access: | http://hdl.handle.net/2005/291 |