Effect Of Squeeze Film Flow On Dynamic Response Of MEMS Structures With Restrictive Flow Boundary Conditions
There are many ways in which the surrounding media, such as air between an oscillating MEMS structure and a fixed substrate, can affect the dynamic response of a MEMS transducer. Some of these effects involve dissipation while others involve energy transfer. Transverse oscillations of a planar struc...
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| Language: | en_US |
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2011
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| Online Access: | http://etd.iisc.ernet.in/handle/2005/1272 http://etd.ncsi.iisc.ernet.in/abstracts/1653/G23830-Abs.pdf |