$Fabricação de novas heteroestruturas a partir de estruturas SOI obtidas pela técnica \'smart-cut\'.$

Fabricação de novas heteroestruturas a partir de estruturas SOI obtidas pela técnica \'smart-cut\'.

Esta pesquisa engloba o estudo e desenvolvimento de novas heteroestruturas semicondutoras, tomando como base as estruturas SOI (Silicon-On-Insulator - silício sobre isolante) obtidas pela técnica Smart Cut, estudadas nestes últimos anos no Departamento de Engenharia de Sistemas Eletrônicos da Es...

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Bibliographic Details
Main Author:	Neisy Amparo Escobar Forhan
Other Authors:	Inés Pereyra
Language:	Portuguese
Published:	Universidade de São Paulo 2006
Subjects:	Heteroestruturas semicondutoras Materiais Microeletrônica "Smart-cut" technology Ion implantation Plasma enhanced chemical vapor deposition (PECVD) SiCOI (Silicon Carbide-On-Insulator) semiconductor heterostructures Silicon carbide (SiC) SOI (Silicon-On-Insulator) structures Thermal annealed
Online Access:	http://www.teses.usp.br/teses/disponiveis/3/3140/tde-02042008-112321/

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