Modificações induzidas por íons de alta energia em filmes finos de organosilicones sintetizados por PECVD

Modificações induzidas por íons de alta energia em filmes finos de organosilicones sintetizados por PECVD

Orientador: Mario Antonio Bica de Moraes === Tese (doutorado) - Universidade Estadual de Campinas, Instituto de Fisica Gleb Wataghin === Made available in DSpace on 2018-08-09T10:56:06Z (GMT). No. of bitstreams: 1 Gelamo_RogerioValentim_D.pdf: 1517991 bytes, checksum: fd93a7ffa508ced1257f9474d2674ae...

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Bibliographic Details
Main Author:	Gelamo, Rogerio Valentim
Other Authors:	UNIVERSIDADE ESTADUAL DE CAMPINAS
Format:	Others
Language:	Portuguese
Published:	[s.n.] 2007
Subjects:	Filmes finos Organosilicones Polisiloxanos Polisilazanos Policarbosilanos PECVD Irradiação iônica Thin films Polysiloxanes Polysilazanes Polycarbosilanes Ion irradiation
Online Access:	GELAMO, Rogerio Valentim. Modificações induzidas por íons de alta energia em filmes finos de organosilicones sintetizados por PECVD. 2007. 103p. Tese (doutorado) - Universidade Estadual de Campinas, Instituto de Fisica Gleb Wataghin, Campinas, SP. Disponível em: <http://www.repositorio.unicamp.br/handle/REPOSIP/278430>. Acesso em: 9 ago. 2018. http://repositorio.unicamp.br/jspui/handle/REPOSIP/278430

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