Estudo da oxidação de AlAs em heteroestruturas semicondutoras

=== In this work, we investigate the oxidation processing of AlAs in semiconductor AlAs/GaAs multilayer structures. Our results show a direct dependence of the depth of oxidation with the time of exposure to the oxidating atmosphere. This leads to a change in the reflectivity of the multilayer stru...

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Bibliographic Details
Main Author: Mcglennon da Rocha Regis
Other Authors: Wagner Nunes Rodrigues
Format: Others
Language:Portuguese
Published: Universidade Federal de Minas Gerais 2002
Online Access:http://hdl.handle.net/1843/ESCZ-5KUPHR