Monitoring and Control of Semiconductor Manufacturing Using Acoustic Techniques
Since semiconductor fabrication processes require numerous steps, cost and yield are critical concerns. In-situ monitoring is therefore vital for process control. However, this goal is currently restricted by the shortage of available sensors capable of performing in this manner. The goal of this...
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| Format: | Others |
| Language: | en_US |
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Georgia Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1853/5278 |