Micromachined piezoelectric-on-silicon platform for resonant sensing and energy harvesting
A microelectromechanical systems (MEMS)-based environmental monitoring platform was presented in this dissertation. All devices were realized using thin-film piezoelectric-on-substrate (TPoS) technology, which provides a path to integrate various functionalities on a single substrate with MEMS compo...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
Georgia Institute of Technology
2014
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1853/52188 |