Design of photomodifiable material systems for maskless patterning of functional ceramic and metallic materials at multiple length scales
Silicon and silicon-based materials have been investigated for the fabrication of electronic, optoelectronic, solar, and structural/mechanical devices. To enable the continuous use of silicon-based materials for next generation device applications, new and inexpensive ways of fabricating features of...
| Main Author: | |
|---|---|
| Other Authors: | |
| Language: | en_US |
| Published: |
Georgia Institute of Technology
2014
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1853/51709 |