Evaluation Methods for Porous Silicon Gas Sensors
This study investigated the behavior of porous silicon gas sensors under exposure to CO, NO, and NH3 gas at the part per million level. Parameters of interest in this study included the electrical, environmental, and chemi-resistive performance associated with various porous silicon morphologies....
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| Format: | Others |
| Language: | en_US |
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Georgia Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1853/4971 |