Theoretical and Numerical Studies of the Air Damping of Micro-Resonators in the Non-Continuum Regime
Micromechanical resonators are used in a variety of sensing and filtering applications. In these applications, the accurate performance of micro resonators depends on the sensitivity of these devices to a particular resonance frequency. This sensitivity is measured using the quality factor Q, which...
| Main Author: | |
|---|---|
| Format: | Others |
| Language: | en_US |
| Published: |
Georgia Institute of Technology
2005
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1853/4871 |