Benchmarking and chemical doping techniques for nanoscale graphene interconnects

The interconnect fabric that provides electrical connectivity to active devices is an essential component to modern semiconductor chips. As the dimensions of these devices are scaled to improve performance and keep pace with Moore's Law, the local Cu interconnects must scale in parallel. Intr...

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Bibliographic Details
Main Author: Brenner, Kevin A.
Published: Georgia Institute of Technology 2013
Subjects:
Online Access:http://hdl.handle.net/1853/47581