Compact silicon diffractive sensor: design, fabrication, and functional demonstration
The primary objective of the presented research is to develop a class of integrated compact silicon diffractive sensors (CSDS) based on in-plane diffraction gratings. This class of sensors uses a silicon-on-insulator (SOI) substrate to limit costs, exploit established fabrication processes, enable i...
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Georgia Institute of Technology
2013
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| Online Access: | http://hdl.handle.net/1853/45882 |