Compact silicon diffractive sensor: design, fabrication, and functional demonstration

Compact silicon diffractive sensor: design, fabrication, and functional demonstration

The primary objective of the presented research is to develop a class of integrated compact silicon diffractive sensors (CSDS) based on in-plane diffraction gratings. This class of sensors uses a silicon-on-insulator (SOI) substrate to limit costs, exploit established fabrication processes, enable i...

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Bibliographic Details
Main Author: Maikisch, Jonathan Stephen
Published: Georgia Institute of Technology 2013
Subjects:
Integrated diffraction grating
Finite-difference time-domain simulation
Rigorous coupled-wave analysis
Diffraction gratings
Microelectronics
Microtechnology
Online Access:http://hdl.handle.net/1853/45882

Internet

http://hdl.handle.net/1853/45882

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