A microscale chemical sensor platform for environmental monitoring

The objective of this research is to apply micromachined silicon-based resonant gravimetric sensors to the detection of gas-phase volatile organic compounds (VOCs). This is done in two primary tasks: 1) the optimization and application of silicon disk resonators to the detection of gas-phase VOCs...

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Bibliographic Details
Main Author: Truax, Stuart
Published: Georgia Institute of Technology 2013
Subjects:
PIB
Online Access:http://hdl.handle.net/1853/45780