Nanoindentation of YSZ-alumina ceramic thin films grown by combustion chemical vapor deposition
Combustion chemical vapor deposition (combustion CVD) is a thin film deposition process that uses a flame created by the ignition of an aerosol containing precursors dissolved in a flammable solvent. Combustion CVD is a relatively new technique for creating thin film oxide coatings. Combustion CVD h...
Main Author: | |
---|---|
Published: |
Georgia Institute of Technology
2012
|
Subjects: | |
Online Access: | http://hdl.handle.net/1853/43977 |