Variation modeling, analysis and control for multistage wafer manufacturing processes

Variation modeling, analysis and control for multistage wafer manufacturing processes

Geometric quality variables of wafers, such as BOW and WARP, are critical in their applications. A large variation of these quality variables reduces the number of conforming products in the downstream production. Therefore, it is important to reduce the variation by variation modeling, analysis a...

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Bibliographic Details
Main Author: Jin, Ran
Published: Georgia Institute of Technology 2011
Subjects:
Gaussian process models
Quality control
Wafer manufacturing process
Data mining
Data fusion
Integrated circuits Wafer-scale integration
Manufacturing processes
Online Access:http://hdl.handle.net/1853/41077

Internet

http://hdl.handle.net/1853/41077

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