Micromachined diffraction based optical microphones and intensity probes with electrostatic force feedback
Measuring acoustic pressure gradients is critical in many applications such as directional microphones for hearing aids and sound intensity probes. This measurement is especially challenging with decreasing microphone size, which reduces the sensitivity due to small spacing between the pressure port...
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Georgia Institute of Technology
2011
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| Online Access: | http://hdl.handle.net/1853/41065 |