High-density capacitor array fabrication on silicon substrates
System integration and miniaturization demands are driving integrated thin film capacitor technologies with ultra-high capacitance densities for power supply integrity and efficient power management. The emerging need for voltage conversion and noise-free power supply in bioelectronics and portabl...
| Main Author: | |
|---|---|
| Published: |
Georgia Institute of Technology
2011
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1853/37259 |