Influence of the environment and alumina coatings on the fatigue degradation of polycrystalline silicon films
Previous studies on very high-cycle fatigue behavior of thin silicon films suggest a strong environmental dependence of the degradation mechanism, the precise nature of which is still subject to debate. In the present study, 2-micron-thick polycrystalline Si notched cantilever beam structures were u...
| Main Author: | |
|---|---|
| Published: |
Georgia Institute of Technology
2010
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1853/31766 |