Design and characterization of silicon micromechanical resonators
The need for miniaturized frequency-selective components in electronic systems is clear. The questions are whether and how micro-electro-mechanical systems (MEMS) can satisfy the need. This dissertation aims to address these questions from a scientific perspective. Silicon is the focus of this wo...
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Georgia Institute of Technology
2009
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| Online Access: | http://hdl.handle.net/1853/29634 |