Optimization of piezoresistive cantilevers for static and dynamic sensing applications
The presented work aims to optimize the performance of piezoresistive cantilevers in cases where the output signal originates either from a static deflection of the cantilever or from the dynamic (resonance) characteristic of the beam. Based on a new stress concentration technique, which utilizes...
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Georgia Institute of Technology
2009
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| Online Access: | http://hdl.handle.net/1853/28247 |