Scanning micro interferometer with tunable diffraction grating for low noise parallel operation
Large area high throughput metrology plays an important role in several technologies like MEMS. In current metrology systems the parallel operation of multiple metrology probes in a tool has been hindered by their bulky sizes. This study approaches this problem by developing a metrology technique ba...
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Georgia Institute of Technology
2009
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| Online Access: | http://hdl.handle.net/1853/28142 |