Integrated optical interferometric sensors on silicon and silicon cmos
The main objective of this research is to fabricate and characterize an optically integrated interferometric sensor on standard silicon and silicon CMOS circuitry. An optical sensor system of this nature would provide the high sensitivity and immunity to electromagnetic interference found in interfe...
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Georgia Institute of Technology
2009
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| Online Access: | http://hdl.handle.net/1853/26674 |