Fabrication, characterization, and application of multifunctional microcantilever heaters
Thermal, electrical, and mechanical characteristics of heated cantilevers were experimentally studied in various conditions. Experiments investigated thermal, mechanical, and coupled behaviors of the heated cantilevers under DC, AC, and transient electrical heating. Raman spectroscopy measured local...
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Georgia Institute of Technology
2008
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| Online Access: | http://hdl.handle.net/1853/22697 |