Materials and methods for nanolithography using scanning thermal cantilever probes
This work presents the novel applications of heated AFM tip in nanolithography. Different strategies were investigated for patterning materials using heated AFM tip. New materials were developed for these new nanolithography methods. Simulation and modeling work was done to further understand the he...
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Georgia Institute of Technology
2008
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| Online Access: | http://hdl.handle.net/1853/22536 |