Polymer/Ceramic Wireless MEMS Pressure Sensors for Harsh Environments: High Temperature and Biomedical Applications
This dissertation presents an investigation of miniaturized sensors, designed to wirelessly measure pressure in harsh environments such as high temperature and biomedical applications. Current wireless MEMS pressure sensors are silicon-based and have limited high temperature operation, require inter...
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Georgia Institute of Technology
2008
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| Online Access: | http://hdl.handle.net/1853/19789 |