Polymer/Ceramic Wireless MEMS Pressure Sensors for Harsh Environments: High Temperature and Biomedical Applications

Polymer/Ceramic Wireless MEMS Pressure Sensors for Harsh Environments: High Temperature and Biomedical Applications

This dissertation presents an investigation of miniaturized sensors, designed to wirelessly measure pressure in harsh environments such as high temperature and biomedical applications. Current wireless MEMS pressure sensors are silicon-based and have limited high temperature operation, require inter...

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Bibliographic Details
Main Author: Fonseca, Michael Agapito
Published: Georgia Institute of Technology 2008
Subjects:
High temperature
Pressure
Sensors
MEMS
Passive
Wireless
Biomedical
Detectors
Biosensors
Extreme environments
Microelectromechanical systems
Wireless communication systems
Online Access:http://hdl.handle.net/1853/19789

Internet

http://hdl.handle.net/1853/19789

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