Simulation of a cylindrical CVD reactor for deposition of silicon carbide

Simulation of a cylindrical CVD reactor for deposition of silicon carbide

Bibliographic Details
Main Author: Ludden, John Michael
Published: Georgia Institute of Technology 2007
Subjects:
Silicon carbide
Vapor-plating
Chemical reactors
Online Access:http://hdl.handle.net/1853/15879

Internet

http://hdl.handle.net/1853/15879

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