A Micromachined Ultrasonic Droplet Generator: Design, Fabrication, Visualization, and Modeling
The focus of this Ph.D. thesis research is a new piezoelectrically driven micromachined ultrasonic atomizer concept that utilizes fluid cavity resonances in the 15 MHz range along with acoustic wave focusing to generate the pressure gradient required for droplet or jet ejection. This ejection techni...
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| Format: | Others |
| Language: | en_US |
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Georgia Institute of Technology
2006
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| Online Access: | http://hdl.handle.net/1853/11571 |