Analytical Approach to Estimating AMHS Performance in 300mm Fabs

Analytical Approach to Estimating AMHS Performance in 300mm Fabs

This thesis proposes a computationally effective analytical approach to automated material handling system (AMHS) performance modeling for a simple closed loop AMHS, such as is typical in supporting a 300mm wafer fab bay. Discrete-event simulation can produce accurate assessments of the production...

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Bibliographic Details
Main Author: Nazzal, Dima
Format: Others
Language:en_US
Published: Georgia Institute of Technology 2006
Subjects:
Vehicle blocking
Markov chains
Semiconductors
Material handling
Materials handling Automation
Semiconductor industry
Queuing theory
Markov processes
Online Access:http://hdl.handle.net/1853/11557

Internet

http://hdl.handle.net/1853/11557

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