Determining intrinsic stresses in layered materials via nanoindentation – the question of in principle feasibility
The paper treats the question of feasibility of measuring intrinsic thin film stresses due to nanoindentation. A variety of different methods is proposed and analysed with respect to their applicability. As this accuracy-estimation results in boundary conditions for the measurements which can not be...
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| Format: | Others |
| Language: | English |
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Universitätsbibliothek Chemnitz
2006
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| Online Access: | http://nbn-resolving.de/urn:nbn:de:swb:ch1-200600185 http://nbn-resolving.de/urn:nbn:de:swb:ch1-200600185 http://www.qucosa.de/fileadmin/data/qucosa/documents/5132/data/index.html http://www.qucosa.de/fileadmin/data/qucosa/documents/5132/data/FilmDoctor_Setup0_993.zip http://www.qucosa.de/fileadmin/data/qucosa/documents/5132/data/intrins.pdf http://www.qucosa.de/fileadmin/data/qucosa/documents/5132/20060018.txt |
Internet
http://nbn-resolving.de/urn:nbn:de:swb:ch1-200600185http://nbn-resolving.de/urn:nbn:de:swb:ch1-200600185
http://www.qucosa.de/fileadmin/data/qucosa/documents/5132/data/index.html
http://www.qucosa.de/fileadmin/data/qucosa/documents/5132/data/FilmDoctor_Setup0_993.zip
http://www.qucosa.de/fileadmin/data/qucosa/documents/5132/data/intrins.pdf
http://www.qucosa.de/fileadmin/data/qucosa/documents/5132/20060018.txt