On the determination of film stress from substrate bending: STONEY´s formula and its limits
The paper examines the problem of film stress applying a correct three dimensional model. The results are compared with two different forms of Stoney´s equation existing in the Litera-ture and being widely used in the determination of stresses in thin films. It is shown theoretically that only one...
| Main Authors: | , |
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| Format: | Others |
| Language: | English |
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Universitätsbibliothek Chemnitz
2006
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| Online Access: | http://nbn-resolving.de/urn:nbn:de:swb:ch1-200600111 http://nbn-resolving.de/urn:nbn:de:swb:ch1-200600111 http://www.qucosa.de/fileadmin/data/qucosa/documents/5126/data/Stoney.pdf http://www.qucosa.de/fileadmin/data/qucosa/documents/5126/20060011.txt |