Alternatives Antriebs-und Auswerteverfahren für die Mikrosystemtechnik
In this paper the development, the fabrication and the experimental characterisation of a novel electrodynamic-driven micro-actuator for in plane motions and a novel vertical field effect transistor (vertical FET) is presented. The micro-actuator for motion is based on the Lorentz force generated b...
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| Format: | Doctoral Thesis |
| Language: | deu |
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Universitätsbibliothek Chemnitz
2004
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| Online Access: | http://nbn-resolving.de/urn:nbn:de:swb:ch1-200401542 http://nbn-resolving.de/urn:nbn:de:swb:ch1-200401542 http://www.qucosa.de/fileadmin/data/qucosa/documents/4897/data/diss.pdf http://www.qucosa.de/fileadmin/data/qucosa/documents/4897/20040154.txt |