Frequenzselektive Vibrationssensoren mit spannungsgesteuerter Resonanzabstimmung in Oberflächenmikromechanik
Basic resonator structures for frequency-selective capacitive vibration sensors which exploit their mechanical resonance peak for spectral selectivity are developed and analyzed. As an important capability, the stuctures offer voltage-controlled frequency tuning realized by electrostatic principles....
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Doctoral Thesis |
| Language: | deu |
| Published: |
Universitätsbibliothek Chemnitz
2003
|
| Subjects: | |
| Online Access: | http://nbn-resolving.de/urn:nbn:de:swb:ch1-200301366 http://nbn-resolving.de/urn:nbn:de:swb:ch1-200301366 http://www.qucosa.de/fileadmin/data/qucosa/documents/4747/data/dissertation2002_jwibbeler.pdf http://www.qucosa.de/fileadmin/data/qucosa/documents/4747/20030136.txt |