Frequenzselektive Vibrationssensoren mit spannungsgesteuerter Resonanzabstimmung in Oberflächenmikromechanik

Frequenzselektive Vibrationssensoren mit spannungsgesteuerter Resonanzabstimmung in Oberflächenmikromechanik

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Basic resonator structures for frequency-selective capacitive vibration sensors which exploit their mechanical resonance peak for spectral selectivity are developed and analyzed. As an important capability, the stuctures offer voltage-controlled frequency tuning realized by electrostatic principles....

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Bibliographic Details
Main Author: Wibbeler, Jürgen
Other Authors: TU Chemnitz, Fakultät für Elektrotechnik und Informationstechnik
Format: Doctoral Thesis
Language:deu
Published: Universitätsbibliothek Chemnitz 2003
Subjects:
Frequenzabstimmung
MEMS
Spektrumanalyse
Verschleißüberwachung
capacitive sensor
frequency tuning
large signal response
nonlinear oscillation
resonance
spectrum analysis
stress-stiffening
vibration sensor
wear monitoring
ddc:620
Großsignalverhalten
Kapazitiver Sensor
Mikromechanik
Nichtlineare Schwingung
Resonanz
Vibrationssensor
Online Access:http://nbn-resolving.de/urn:nbn:de:swb:ch1-200301366
http://nbn-resolving.de/urn:nbn:de:swb:ch1-200301366
http://www.qucosa.de/fileadmin/data/qucosa/documents/4747/data/dissertation2002_jwibbeler.pdf
http://www.qucosa.de/fileadmin/data/qucosa/documents/4747/20030136.txt

Internet

http://nbn-resolving.de/urn:nbn:de:swb:ch1-200301366
http://nbn-resolving.de/urn:nbn:de:swb:ch1-200301366
http://www.qucosa.de/fileadmin/data/qucosa/documents/4747/data/dissertation2002_jwibbeler.pdf
http://www.qucosa.de/fileadmin/data/qucosa/documents/4747/20030136.txt

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