Focused Ion Beam Sputtering of Silicon and Related Materials
The impressive development of focused ion beam (FIB) systems from the laboratory level to high performance industrial machines during the last twenty years is briefly reported. The design and the functional principle of a liquid metal ion source as well as a FIB column are described. Main applicatio...
| Main Authors: | , |
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| Format: | Others |
| Language: | English |
| Published: |
Forschungszentrum Dresden
2010
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| Online Access: | http://nbn-resolving.de/urn:nbn:de:bsz:d120-qucosa-30797 http://nbn-resolving.de/urn:nbn:de:bsz:d120-qucosa-30797 http://www.qucosa.de/fileadmin/data/qucosa/documents/3079/1143.pdf |