Nanocluster-rich SiO2 layers produced by ion beam synthesis: electrical and optoelectronic properties
The aim of this work was to find a correlation between the electrical, optical and microstructural properties of thin SiO2 layers containing group IV nanostructures produced by ion beam synthesis. The investigations were focused on two main topics: The electrical properties of Ge- and Si-rich oxide...
Main Author: | |
---|---|
Other Authors: | |
Format: | Others |
Language: | English |
Published: |
Forschungszentrum Dresden
2010
|
Subjects: | |
Online Access: | http://nbn-resolving.de/urn:nbn:de:bsz:d120-qucosa-29449 http://nbn-resolving.de/urn:nbn:de:bsz:d120-qucosa-29449 http://www.qucosa.de/fileadmin/data/qucosa/documents/2944/4564.pdf |