Ion-induced stress relaxation during the growth of cubic boron nitride thin films
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | English |
| Published: |
Forschungszentrum Dresden
2010
|
| Online Access: | http://nbn-resolving.de/urn:nbn:de:bsz:d120-qucosa-28863 http://nbn-resolving.de/urn:nbn:de:bsz:d120-qucosa-28863 http://www.qucosa.de/fileadmin/data/qucosa/documents/2886/6560.pdf |